Skip to main content

PVD systems - preferred bidder selected!

Category
Equipment tenders
Date

We are excited to announce that Angstrom Engineering have been successfull in their tender for both PVD systems for the Leeds Nanotechnology Cleanroom. Over the next 10 months, we will be working closely with Angstrom to finalise the design. Briefly, the two systems will comprise:

  • A Thermal Evaporation system, with:
    • 6 sources controlled in pairs, each pair with a dedicated QCM, for co-deposition
    • Ion-beam enhanced deposition
    • Substrate rotation, including lift-off dome for holding up to four, 4" wafers
    • Substrate indexing for constant source-substrate throw distance between layers
  • A Mixed Deposition system, with:
    • An 8-pocket e-beam source
    • Four thermal sources for co-deposition with e-beam layers
    • A 2" RF sputtering target
    • Ion-beam enhanced deposition
    • Substrate rotation, including lift-off dome for holding up to four, 4" wafers
    • Substrate indexing for constant source-substrate throw distance between layer