Skip to main content

Dry etch and deposition systems - winning bidder

Category
Equipment tenders
Date
Dry etch and deposition systems - winning bidder

We are delighted to announce that Oxford Instruments Plasma Technologies have been successful in their bids for all four Lots. The winning systems include:

  • A PlasmaPro 100 Estrelas Deep Reactive Ion etcher, with BOSCH and cryogenic etching capability;
  • a PlasmaPro 100 Cobra ICP-RIE;
  • a PlasmaPro 100 ICP-CVD;
  • and a PlasmaPro 80 RIE.

The systems are expected to be installed and commissioned by the end of February 2024.