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Delivery of new Plasma Etch and Deposition Systems


This week, the Leeds Nanotechnology Cleanroom received four new plasma etch and deposition systems from Oxford Instruments Plasma Technologies. These include:Pallets on a truck

  • A PlasmaPro 100 Estrelas Deep Reactive Ion etcher with BOSCH and cryogenic etching capability;
  • A PlasmaPro 100 Cobra ICP-RIE with ALE capability;
  • A PlasmaPro 100 ICP-CVD;
  • A PlasmaPro 80 RIE.

These additions will enhance the Wrapped ICPdry etch and deposition capabilities of the cleanroom, unlocking new research opportunities across the physical sciences. Stay tuned for updates on the commissioning and release of these tools.

For details of how to access our processing capabilities, including future use of our new suite of plasma tools, please contact us. We support direct access, fabrication as a service, and can contribute our extensive process development expertise to help you achieve your next generation technologies.

For those interested in dry etch techniques, why not join us in April at the University of Leeds for a free Dry Etch Workshop, sponsored by Oxford Instruments Plasma Technology.